Cleanroom equipment: the core support for precise contamination control and the cornerstone of quality in high-end industries.
Cleanroom equipment can be divided into four core systems based on function. These systems work together to form a complete chain of control, from source purification to process regulation, contamination interception, and real-time monitoring, ensuring the clean environment continuously meets standards.
(I) Air Purification System: The "Lungs" of a Clean Environment
Air purification is a core requirement of cleanrooms. This system, through multi-stage filtration and precise air delivery, removes particulate matter, microorganisms, and other pollutants from the air at the source, and is crucial in determining the cleanliness level. Its core equipment includes:
Multi-stage filters: As the "core line of defense" of the purification system, forming a three-stage filtration system of pre-filters, medium-efficiency filters, and high-efficiency filters (HEPA/ULPA). Pre-filters intercept particles larger than 5 microns, while medium-efficiency filters handle particles between 1 and 5 microns. Together, they reduce the workload on high-efficiency filters (HEPA), extending their lifespan. HEPA filters can intercept over 99.97% of particles smaller than 0.3 microns, while ultra-high-efficiency filters (ULPA) achieve an even higher interception efficiency of 99.999% for 0.12-micron particles, serving as the final guarantee for achieving cleanliness standards. They are typically installed at the end of the air supply line.
Fan Filter Unit (FFU): An independent air supply device integrating a fan and HEPA filter. It allows for modular layout and full-area installation to create a vertical unidirectional airflow, quickly removing contaminants from the area. It is a core component of ISO 5-6 level (Class 100/Class 1000) high-cleanliness areas.
Supply/Return Air System: Composed of ductwork, fans, and valves, this system is responsible for evenly delivering purified air to all areas of the cleanroom and recovering contaminated air for further treatment. Through proper airflow design, unidirectional or non-unidirectional flow layouts can be achieved, ensuring uniform cleanliness and avoiding contamination dead zones.
(II) Environmental Control System: A Precise Tool for Stable Operating Conditions
Besides cleanliness, the stability of parameters such as temperature, humidity, and air pressure directly affects production processes and product quality. The environmental control system ensures these parameters remain within set ranges through precise intervention:
Cleanroom Air Conditioning Units: Integrating cooling, heating, humidification, dehumidification, and filtration functions, these units achieve precise temperature and humidity control (e.g., ±0.1℃ temperature fluctuation, ±5% relative humidity) while maintaining positive pressure in the cleanroom (typically 10-15 Pa), forming an air barrier to prevent external contamination. Special areas (such as biosafety laboratories) utilize negative pressure design to prevent the leakage of harmful substances.
Differential Pressure Control Equipment: Including differential pressure gauges, differential pressure sensors, and air supply/exhaust regulating valves, these devices monitor the pressure difference between the cleanroom and the outside environment, as well as between areas of different cleanliness levels, in real time. They automatically adjust airflow to maintain a stable pressure gradient, preventing cross-contamination. For example, the positive pressure in a Class 100 area needs to be higher than in a Class 1000 area to ensure unidirectional flow of contaminants.
Specialized Control Equipment: Humidifiers/dehumidifiers, anti-static equipment, etc., are configured according to industry needs. For example, the electronics industry requires ion fans to eliminate static electricity buildup and prevent dust adsorption; the biopharmaceutical industry requires high-precision humidifiers to maintain the humidity requirements of a sterile production environment.
(III) Personnel/Materials Purification Equipment: The "First Line of Defense" for Pollution Control
Personnel and materials entering and exiting the cleanroom are the main sources of pollution. This type of equipment uses "pre-treatment" to block the introduction of pollution at the source:
Air Shower/Cargo Shower: The necessary passage for personnel or materials entering the cleanroom. High-speed clean airflow of 20-25 m/s removes dust particles attached to the surface of the human body or materials; a double-door interlocking design prevents direct connection between clean and non-clean areas, preventing cross-contamination.
Pass-through Window: Used for material transfer between clean and non-clean areas, equipped with UV sterilization function or air curtain isolation design, achieving sterile and dust-free material transfer without disrupting the air pressure balance of the cleanroom.
Personal Protective Equipment (PPE): Includes specialized equipment such as cleanroom suits, gloves, masks, and head coverings. Made of dust-free and anti-static materials, it prevents contaminants such as human hair and dander from entering the clean environment, serving as an important supplement to personnel purification.
(IV) Monitoring and Support System: The "Real-Time Sentinel" of Cleanliness
Through real-time monitoring and intelligent early warning, the system ensures that cleanroom environmental parameters continuously meet standards, while providing data support for operation and maintenance:
Core Monitoring Equipment: A particle counter monitors the concentration of particles in the air in real time; a microbial sampler detects microbial contamination; and temperature, humidity, and differential pressure sensors continuously provide feedback on key parameters, forming a comprehensive monitoring network.
Alarm and Control System: When parameters such as particle concentration, temperature, humidity, and differential pressure exceed set ranges, the alarm system immediately issues an audible and visual alarm, simultaneously triggering automatic adjustments to air conditioning, dampers, and other equipment. High-end systems can achieve remote monitoring and intelligent control via PLC or IoT platforms.
Cleaning and disinfection equipment: including vacuum cleaners equipped with HEPA filters, special disinfectant/disinfectors, cleanroom wipes, etc., to clean and disinfect cleanroom surfaces and equipment without causing secondary pollution, and maintain environmental hygiene.